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Chemical Vapor Deposition: Principles and Applications

This wide-ranging volume covers recent developments in the theoretical understanding of the chemistry and physics of chemical vapour deposition (CVD). Contributors are drawn from both academia and industry to achieve a balaced coverage of the subject. The volume emphasizes principles and understanding rather than details of specific materials or processes. Specific examples are given to illustrate the principles.

yazar:Academic Press
Isbn 10:0123496705
Isbn 13:978-0123496706
yayınevi:Academic Press
dil:İngilizce
Boyutlar ve boyutlar:15,6 x 3,7 x 23,4 cm
Tarafından gönderildi
Chemical Vapor Deposition: Principles and Applications:
26 Ocak 1993